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The INFICON Penning Gauge PEG100 provides reliable high vacuum measurements. the rugged Penning cold cathode sensor has no filament to burn out. Due to titanium cathode plates and the reduced high voltage after plasma ignition, the gauge can be operated also in sputtering applications. The fieldbus options, in addition to the logarithmic analog output signal, allow easy integration into vacuum systems using Profibus DP or DeviceNet protocols.
PEG100潘宁规的详细介绍
Advantages
| 优点： |
| ■测量范围广：5 X 10 -7～1 Pa |
| ■全金属冷阴极陶瓷传感器 |
| ■新型几何电极提供了极好的点火性能 |
| ■降低等离子点火高电压和钛阴极板污染的危险，即使在氩溅射过程中也一样 |
| ■阳极环和钛阴极可清洗，更换容易 |
| ■磁场强度测量 |
| ■ LED指示灯电源和等离子点火 |
| ■对数模拟输出信号 |
| ■ Fieldbus总线接口(Profibus DB, DeviceNet),集成到真空系统的网络通信 |